Stainless steel FOUP transport trolley built to move FOUPs (Front Opening Unified Pods — the sealed carriers that hold and protect silicon wafers) safely between process bays, stockers and load ports in a semiconductor cleanroom. Fabricated in SS 304 stainless steel with smooth, corrosion-resistant surfaces that wipe down easily for a particle-controlled environment.
Each of the two tiers carries two located FOUP positions — 4 pods in total — with wire guides that seat and retain each pod. The platforms sit on anti-vibration suspension mounts that absorb shock and vibration while the trolley is in motion, protecting the wafers inside from micro-damage and particle generation during transport.
- Capacity: up to 4 FOUPs (2 per tier, 2 tiers) on located, guided platforms
- Wafer protection: anti-vibration suspension mounts cushion each pod against shock and vibration during movement
- Material: SS 304 stainless steel (304/316 to specification) — corrosion-resistant and cleanroom-compatible
- ESD / anti-static: static-controlled construction suited to wafer and FOUP handling
- Platforms: perforated shelves for airflow and easy cleaning, with wire retaining guides
- Mobility: ergonomic push handle and cleanroom-grade swivel castors with brakes
- Made to order: pod count, tier layout, dimensions and stainless grade built to your specification
Applications: semiconductor fabs and wafer-handling cleanrooms — FOUP transfer between litho, etch, diffusion and metrology bays, stockers and load ports.
Request a quote for pod configuration, size and stainless grade to match your fab.
