Stainless steel FOUP transport trolley built to move FOUPs (Front Opening Unified Pods — the sealed carriers that hold and protect silicon wafers) safely between process bays, stockers and load ports in a semiconductor cleanroom. Fabricated in SS 304 stainless steel with smooth, corrosion-resistant surfaces that wipe down easily for a particle-controlled environment.
The two tiers carry 2 FOUPs, each seated on a spring-damper suspension cradle, and the trolley rolls on vibration-isolating castors. Together they absorb shock and road vibration while the trolley is in motion, protecting the wafers inside from micro-damage and particle generation during transport.
- Capacity: 2 FOUPs (one per tier) on located suspension cradles
- Wafer protection: spring-damper suspension plus vibration-isolating castors cushion each pod against shock and vibration in transit
- Material: SS 304 stainless steel (304/316 to specification) — corrosion-resistant and cleanroom-compatible
- ESD / anti-static: static-controlled construction suited to wafer and FOUP handling
- Platforms: perforated shelves for airflow and easy cleaning
- Mobility: ergonomic push handle and cleanroom-grade swivel castors with brakes
- Made to order: pod count, tier layout, dimensions and stainless grade built to your specification
Applications: semiconductor fabs and wafer-handling cleanrooms — FOUP transfer between litho, etch, diffusion and metrology bays, stockers and load ports.
Request a quote for pod configuration, size and stainless grade to match your fab.
